LaReCa Project: Developing high-resolution nanosensor systems for the semiconductor industry
We are happy to celebrate the first year of progress in the LaReCa project! Through this innovative initiative, we are advancing high-resolution nanosensor systems designed specifically for the semiconductor industry. Leveraging self-sensing cantilevers and cutting-edge Focused Electron Beam Induced Deposition (FEBID) technology, LaReCa is set to make a significant impact in nanoscale sensing.
Project highlights:
- High Spatial & Force Resolution: Our trilayer cantilevers with single crystalline Si strain sensors offer up to 4x enhanced sensitivity, optimizing precision in challenging applications.
- Innovative Probing Capabilities: Featuring sharp, conductive tips for real-time control with minimized risk of sample damage.
- FEBID Technology: Enables customizable and highly visible tips from the top for accurate, in-situ positioning.
- New Product Family: Introducing conductive and magnetic probes tailored for electrical and AFM applications, expanding options for researchers and engineers alike.
Key Strengths:
- Ultra-sharp tips (radius <10 nm), with durability and customization options to fit various needs.
- Top-visible tips for fast and efficient positioning.
Project Collaborators: This project is a collaborative effort with NANO contact and Technische Universität Wien (Austria), as well as Leibniz-Institute for Photonic Technology (IPHT) and SmarAct Group (Germany).
Funding: Supported by the IraSME network, with funding from the FFG Austrian Research Promotion Agency and ZIM (Federal Ministry for Economic Affairs and Climate Action).
We look forward to the continued development of the LaReCa project as we push the boundaries of nanoscale material analysis and bring these state-of-the-art sensors to the market. Stay tuned.