Trilayer cantilevers · Cryogenic

QCT Cantilever Probes

Silicon Nitride-Polymer AFM probes for low-temperature experiments

General description

The Quantum Cryogenic Trilayer (QCT) Cantilevers are engineered with an innovative trilayer structure combining silicon nitride films with a polymer core. This design increases thickness without adding excessive stiffness, delivering up to 4x higher force sensitivity (μV/nN) compared to standard single-crystalline silicon cantilevers. The SiN/Polymer interface provides excellent electrical insulation, ensuring sensor reliability and durability—even in demanding environments. Platinum traces on the cantilever surface efficiently transfer signals to the tip, while remaining electrically isolated from the integrated Wheatstone bridge.

Optimized for low-temperature experiments, QCT Cantilevers offer unmatched sensitivity, robustness, and performance for advanced research applications. The V-shaped triple-beam TLCQCT3-V is custom-engineered to provide improved mechanical stability and signal transfer.

Applications

Low-temperature-AFM / KPFM
Probing quantum coherence, tunneling phenomena, and spin dynamics
Quantum Twisting Microscopy
Sensitive force detection in cryogenic environments

What about your application?

TLCQTC Series: Specifications

Parameter	Value (all models)
Material	SiN with a polymer core
Tip material	Tipless
Modes	Low-temperature compatible
Pt metal thickness	70 nm
*Dimensions (length × width × thickness)**	300 µm × 80 µm × 4 µm
Nominal res. freq.	50 kHz
Nominal spring const.	5 N/m
Deflection sensitivity**	2 µV/nm
Deflection sensing	On-chip piezoresistive bridge
Actuator	External shaker
Electrical connections	Unbonded (bare chip)